COE - Safe Work Procedure
Cleanroom I |
|
| Ebeam Evaporator | SWP-COE-01-Ebeam |
| Mask Aligner | SWP-COE-02-Mask Aligner |
| I-V Probe station | SWP-COE-03-Probe station |
| Rapid Thermal Annealing | SWP-COE-04-RTA |
| Homogenizer | SWP-COE-05-Homogenizer |
| Centrifuge | SWP-COE-06-Centrifuge |
| Alpha Step Surface Profiler | SWP-COE-07-Alpha step |
Cleanroom II |
|
| Molecular Beam Epitaxy system (MBE) | SWP-COE-08-MBE |
| Laser Writer | SWP-COE-09-Laser writer |
Cleanroom III |
|
| Metal Organic Chemical Vapor Deposition system (MOCVD) Emcore | SWP-COE-10-MOCVD-Emcore |
| Metal Organic Chemical Vapor Deposition system (MOCVD) Aixtron | SWP-COE-11-MOCVD-Aixtron |
COE Lab E3 - Level 3 |
|
| X-Ray Diffraction system (XRD) MRD | SWP-COE-12-MRD-XRD |
| Low Temperature Photoluminescence | SWP-COE-13-LT-PL |
COE Lab E3 - Level 2 |
|
| Micro - Photoluminescence | SWP-COE-14-micro-PL |
General Laboratory |
|
| Gas Cabinet | SWP-COE-15-Gas cabinet |
| Gas Cylinder Changing | SWP-COE-16-Gas cylinder changing |
| Liquid Nitrogen Collection | SWP-COE-17-LN2 collection |
| ELF Tank Handling | SWP-COE-18-ELF Tank handling |
| H2 Pallet Handling | SWP-COE-19-H2 pallet handling |
| Wet Bench | SWP-COE-20-Wet Bench |